发明名称 |
Piezoresistive cantilever for scanning probe microscope |
摘要 |
A cantilever for a scanning probe microscope is disclosed. The cantilever includes a piezoresistor for detecting the deflection of the cantilever, and a tip which is formed integrally with the cantilever. A process of fabricating such a cantilever is also disclosed, the process yielding a tip which has a high aspect ratio and a small radius of curvature at its apex. A combined atomic force/lateral force microscope including two or more piezoresistors responsive to both the bending and torsion of the cantilever is also disclosed.
|
申请公布号 |
US5444244(A) |
申请公布日期 |
1995.08.22 |
申请号 |
US19930073201 |
申请日期 |
1993.06.03 |
申请人 |
PARK SCIENTIFIC INSTRUMENTS CORPORATION |
发明人 |
KIRK, MICHAEL D.;SMITH, IAN R.;TORTONESE, MARCO;CAHILL, SEAN S.;SLATER, TIMOTHY G. |
分类号 |
G01Q30/02;G01Q20/04;G01Q60/38;H01J37/00;(IPC1-7):H01J37/00 |
主分类号 |
G01Q30/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|