发明名称 COMPARATIVE IMAGE INSPECTION APPARATUS
摘要 PURPOSE:To sharply reduce the amount of image data to be filed in a comparative image inspection apparatus in which the abnormality of image data is detected by comparing data images. CONSTITUTION:Reference image data which is constituted of (n) bits and inspected image data are inputted to a coincidence and disagreement detection means 2. When no disagreement exists in both data, a prescribed signal from the coincidence and disagreement detection means 2 is outputted as a Lo signal. Only the reference image data is inputted to a reference-image-data standardization means 3 and it is shaped as store data and preserved in a preservation means 4. When the reference image data does not coincide with the inspected image data, the prescribed signal from the coincidence and disagreement detection means 2 becomes a Hi signal. The inspected image data at this time is input to an inspected-image-data standardization means 3a, and it is shaped as store data and preserved in the preservation means 4 simultaneously with the reference image data. Thereby, a part, of the inspected image data, which does not coincide with the reference image data is filed.
申请公布号 JPH07225192(A) 申请公布日期 1995.08.22
申请号 JP19940015577 申请日期 1994.02.09
申请人 HITACHI VLSI ENG CORP 发明人 YOSHIDA MASAHIRO;II HARUO;CHIBA YUKINOBU
分类号 G01B11/24;G01N21/88;G01N21/93;G01N21/956;G06T1/00;G06T7/00;H01L21/66 主分类号 G01B11/24
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