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经营范围
发明名称
SUBSTRATE TRANSFER DEVICE
摘要
申请公布号
JPH07226377(A)
申请公布日期
1995.08.22
申请号
JP19940016241
申请日期
1994.02.10
申请人
KOKUSAI ELECTRIC CO LTD
发明人
OKAYAMA TOMOHIKO
分类号
H01L21/677;H01L21/205;H01L21/68;(IPC1-7):H01L21/205
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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