| 发明名称 |
Sealing method for reaction gases |
| 摘要 |
Reaction gases are prevented from escaping from a reaction chamber through the use of flexible or gas seals between the interface of the reaction chamber and the junction used to connected successive reaction chambers.
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| 申请公布号 |
US5443860(A) |
申请公布日期 |
1995.08.22 |
| 申请号 |
US19940204912 |
申请日期 |
1994.03.02 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
WILKINSON, THOMAS F. |
| 分类号 |
C23C16/54;H01L21/00;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/54 |
| 代理机构 |
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| 地址 |
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