发明名称 Apparatus for testing semiconductor devices using a conductive sheet
摘要 A semiconductor apparatus for functionally inspecting semiconductor devices is designed to prevent contact failure, deformation, and the like caused by solder transferred from external leads of semiconductor devices and deposited on contact terminals of the inspection apparatus. A sheet having metal-film patterns corresponding to an array of external leads of a semiconductor device is interposed between the external leads and the contact terminals to electrically connect the external leads to the contact terminals. The semiconductor device is inspected and the sheet is changed at a suitable time when it is contaminated with solder.
申请公布号 US5444388(A) 申请公布日期 1995.08.22
申请号 US19940223538 申请日期 1994.04.05
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 IDETA, YASUSHI;UMEZU, TSUNENORI;WASHITANI, AKIHIRO
分类号 G01R31/26;G01R1/04;G01R31/28;H01L21/66;H01R33/76;(IPC1-7):G01R31/00;G01R31/02 主分类号 G01R31/26
代理机构 代理人
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