| 摘要 |
PURPOSE:To configure a detector of force and motion according to the capacity change based on the displacement of a detection plate caused by operated force without using an oscillation circuit and a demodulation circuit. CONSTITUTION:Vibration generated in y-axis direction due to coriolis force is detected as the capacity change of a capacitor Cx which is formed by allowing an electrode 26 provided at a vibration part 14 and an electrode 28 provided at the side of a fixed wall 20 to sandwich an air layer. This capacitor is used as the capacitor Cx for connecting the output side of an operational amplifier 0P2 of a switched capacitor circuit 35 for amplifying a reference voltage and an inverted input side. When the vibration part 14 vibrates due to angular velocity, capacity changes and the change is outputted as the change in the output voltage of the switched capacitor circuit 35. Since neither oscillation circuit nor demodulation circuit is used, motion such as angular velocity and operated force can be accurately detected without being influenced by the frequency characteristics of a circuit. |
