SOLID EMISSION IMAGING DEVICE AND MANUFACTURE OF IMAGING DEVICE ARRANGE

摘要

PURPOSE: To provide a solid-state radiation imager wherein one dielectric layer can be removed from an assembled array. CONSTITUTION: A radiation imager includes an optical sensor array having a plurality of separately addressable pixels. Each pixel has a photosensor island and a thin-film transistor(TFT) 130 related to the photosensor island. The TFT 130 is so located as to electrically connect selected photosensor islands to a predetermined address line. In each pixel, a single common passivation layer 160 is located above the TFT 130 and the photosensor island and the layer 160 is brought into contact with both an external face of the TFT 130 and part of an external face of the photosensor island.