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发明名称
MANUFACTURE OF INSULATING FILM
摘要
申请公布号
JPH07221089(A)
申请公布日期
1995.08.18
申请号
JP19940013050
申请日期
1994.02.07
申请人
FUJI ELECTRIC CO LTD
发明人
SHIMIZU AKIO;SAKAKIBARA YASUSHI
分类号
H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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