| 摘要 |
PURPOSE:To prevent such mass stack phenomenon that a protruding part and a contacting part stick to each other, which constitute a stopper mechanism to restrict displacement of a weight provided on a semiconductor base board. CONSTITUTION:A semiconductor base board 1 made of silicon is installed on a pedestal 2 made of glass, and a weight 4 is provided in the center of this base board 1 and is supported by a beam 5 stretching from the supporting part 3 of the board 1. A protruding part 7 is formed on the weight 4 and a stopper 8 formed on the supporting part 3, and these constitute a stopper mechanism 6. On the surfaces of the board 1 and pedestal 2, a facial layer 9 is provided which consists of a fluorine series surface active agent or a silane coupling agent for preventing a mass stack phenomenon. |
