| 摘要 |
PURPOSE: To acceleratedly absorb ionized atomic and molecular residues which are desorbed and/or come into collision in a contaminant-absorbing layer by applying a proper potential between the contaminant-absorbing layer and a charged particle source layer and further installing an electric field particle drawing out electrode between both layers. CONSTITUTION: A reception terminal 304 is arranged on the opposite to an active device part 340 produced by forming a charged particle source layer 305 and a drawing out electrode 310 in both sides of an insulating layer 309 and a prescribed voltage is applied by electric power sources 316, 318. Consequently, charge particle 306 generated in the charged particle source layer 305 is transported to the surface of the reception terminal 304 through the transport region 330 from an aperture 321. In such a contaminant ballistic charge transport apparatus, a contaminant-absorbing layer 312 and a drawing out electrode 303 on a supporting substrate 3021 are arranged through insulating layers 302, 308 and a prescribed voltage is applied by an electric power source 314. Consequently, generated contaminant particles 307 are acceleratedly absorbed toward the contaminant-absorbing layer 312 through an aperture 320 prior to others and contamination of the reception terminal and the charged particle source 305 is prevented.
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