METHOD AND EQUIPMENT FOR FORMING FLATTENED FILM,申请号JP19940026105-传众专利搜索

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发明名称	METHOD AND EQUIPMENT FOR FORMING FLATTENED FILM
摘要
申请公布号	JPH07221006(A)	申请公布日期	1995.08.18
申请号	JP19940026105	申请日期	1994.01.28
申请人	SONY CORP	发明人	GOCHO TETSUO
分类号	H01L21/3205;H01L21/027;H01L21/768;(IPC1-7):H01L21/027;H01L21/320	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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