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发明名称
ION IMPLANTER
摘要
申请公布号
JPH07221042(A)
申请公布日期
1995.08.18
申请号
JP19940011053
申请日期
1994.02.02
申请人
RYODEN SEMICONDUCTOR SYST ENG KK;MITSUBISHI ELECTRIC CORP
发明人
KAWASAKI YOJI;SEKIYA KOICHI
分类号
H01J37/317;H01L21/265;(IPC1-7):H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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