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发明名称
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07221176(A)
申请公布日期
1995.08.18
申请号
JP19940011260
申请日期
1994.02.03
申请人
FUJITSU LTD
发明人
IZUMI TAKATOSHI
分类号
C23C16/30;H01L21/205;H01L21/316;H01L21/318;H01L21/768;H01L23/522;(IPC1-7):H01L21/768
主分类号
C23C16/30
代理机构
代理人
主权项
地址
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