AMORPHOUS SILICON-GERMANIUM FILM AND PHOTOVOLTAIC DEVICE USING IT

摘要

PURPOSE:To provide an amorphous silicon germanium film having a low defect density and excellent photoconductivity. CONSTITUTION:The [H(Si)]/[Si] quantity and [H(Ge)]/[Ge] quantity of an amorphous silicon-germanium film against the combined hydrogen in the film are set at specific values by setting the [SiH2]/[Si] quantity, [SiH]/[Si]quantity, and [SiH2]/[SiH] ratio in the film at specific values against the quantity of combined hydrogen per unit Si atoms in the film.