发明名称 |
Halbleiter-Sensoreinrichtung und Verfahren zur Herstellung derselben |
摘要 |
The semiconductor flow rate detector comprises a semiconductor chip having sensor elements on its surface, leads connected to connecting terminals of the semiconductor chip, and a resin base covering junctions between the leads and the connecting terminals of the semiconductor chip and integrally holding them. |
申请公布号 |
DE4241333(C2) |
申请公布日期 |
1995.08.17 |
申请号 |
DE19924241333 |
申请日期 |
1992.12.08 |
申请人 |
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP |
发明人 |
ARAKI, TORU, ITAMI, HYOGO, JP |
分类号 |
G01P5/12;G01F1/68;G01F1/684;G01F1/692;H01L21/56;(IPC1-7):G01F1/692;G01F1/56;H01L23/482;H01L49/00 |
主分类号 |
G01P5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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