Haltevorrichtung und Verfahren zur Plattierung eines höckerförmigen Anschlusses für integrierte Schaltungen.

摘要

This disclosure describes a plating fixture to hold a silicon wafer containing integrated circuits in a metal plating bath. The wafer (11) is coated with photoresist to a thickness equal to the desired bump height and the desired bump locations patterned by standard photolithographic techniques. The wafer is then loaded in the fixture and the fixture placed in the plating bath so that the patterned side of the wafer is facing up and the plating anode (3) is located directly above the wafer (11). Systems presently on the market have the wafer positioned with the patterned side facing down and the anode located below it, or the wafer faces sideways and the anodes are access from it. These present systems allow air to be entrapped in the pattern of the photoresist, lowering yield by under plating or uneven plating of the bumps on the wafer. This disclosure prevents such yield loss and also allows cleanups on the wafer after it is loaded in the fixture.