Radiation-sensitive sulfonic acid esters and their use

摘要

Sulfonic acid esters of 2,4-bistrichloromethyl-6-(mono- or dihydroxyphenyl)-1,3,5-triazine are disclosed. Also disclosed is a negative-working radiation-sensitive mixture containing such a compound in combination with a compound containing at least two acid-crosslinkable groups, and a water-insoluble polymeric binder which is soluble or at least swellable in aqueous alkaline solutions. The esters are esters of a sulfonic acid or sulfonic acids of the formula R-SO3H or R'(-SO3H)2 with 2,4-bistrichloromethyl-6-(mono- or dihydroxyphenyl)-1,3,5-triazine of the formulae I and/or II (I)r substituted (C1-C10)alkyl, (C5-C10)cycloalkyl, (C6-C10)aryl, (C6-C10)aryl-(C1-C10)alkyl or (C3-C9)heteroaryl radical, R' is an optionally substituted (C1-C10)alkylene, (C6-C10)arylene or (C3-C9)heteroarylene radical, and n may be 1 or 2. The radiation-sensitive mixture according to the invention is remarkable for a high resolution and a high sensitivity over a wide spectral range and can be used to produce a radiation-sensitive recording material suitable for producing photoresists, electronic components, or printing plates, or for chemical milling.