| 摘要 |
PURPOSE:To realize the simultaneous machining of a plurality of works while keeping the ratio of use of the laser beam at high level in a laser beam machine of repetitive reflection type projecting machining method. CONSTITUTION:The laser beam is divided into the laser beams 1, 7 by combining a plurality of masks 2, 2',...2n', objective lenses 4, 4'...4n', and auxiliary total reflection mirrors 6, 6'...6(n-1)', and make the divided laser beams incident from each end to allow the repetitive use of the laser beam, the uniform intensity of the laser beam, and the simultaneous machining of a plurality of works. This constitution realizes the simultaneous machining of a plurality of works while the ratio of use of the laser beam at high level in a laser beam machine of repetitive reflection type projecting machining method. |
