| 摘要 |
A method and apparatus for analyzing chemical compounds on a surface, such as the surface of a semiconductor wafer, comprising: a heater component for volatilizing the chemical compounds from the surface and capturing said volatilized compounds, a condensation surface having a hot end and a cold end and a thermal gradient therebetween, means for causing said volatilized chemical compounds to flow along said condensing surface so as to sequentially condense said chemical compounds and an exciter/analyzer for sequentially analyzing said condensed chemical compounds. The exciter/analyzer can comprise an ion beam, laser, or similar exciting device, coupled with a mass analyzer. The exciter/analyzer preferably scans the condensing surface from the hot end to the cold end and withdraws molecules for analysis as they are excited from the surface.
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