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发明名称
PATTERN FORMING METHOD OF SEMICONDUCTOR
摘要
申请公布号
JPH07211704(A)
申请公布日期
1995.08.11
申请号
JP19940217473
申请日期
1994.09.12
申请人
NEC CORP
发明人
KAWAMOTO SHIGERU
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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