摘要 |
<p>PURPOSE:To select the value of a resistance arbitrarily and to form the resistor as small as possible by setting the specified ratio for the resistance value of a resistor region. CONSTITUTION:The minimum resistance value of a resistor region having the resistance values of the ratios of 1, 2, 4,...2<n-1> (n is the number of pieces), i.e., the resistance value of 1, is made to be the minimum adjusting width. Then, the resistor element, which has the resistance value of the integer times of the resistance value of the minimum adjustment, is obtained by selectively connecting these resistor regions in series. The part between contact holes 5 at both ends of a resistor film 32 is shorted. An Al wiring film 6 reaching the contact hole 5 of one end of a resistor film 31 or 33 is formed. Thus, the resistor element having the resistance value of a resistor film 3 for 5L, i.e., the resistance value of 50 OMEGA is obtained between the contact holes 5 at the other ends of the resistor films 31 and 33. When the number of the resistor regions is three, the maximum resistance is up to 7 times the minimum resistance. When the minimum resistance is 10 OMEGA, the maximum value is up to 70 OMEGA. The maximum resistance of 2,550 OMEGA can be obtained by providing eight resistor regions, whose sizes are changed.</p> |