| 摘要 |
PURPOSE:To prevent the disconnection due to a contact of an expanded thermocouple with a protecting tube, and to improve the durability of a thermometer by forming a housing hole part for housing a thermocouple freely to be moved by the thermal expansion thereof in the longitudinal direction at the tip of an insulating bar-like body. CONSTITUTION:Since the thermometer is heated at a high temperature inside a semi-conductor wafer processing device or the like, an insulating bar-like body 18 and thermocouple 20a, 20b forming a thermocouple are expanded in the longitudinal direction. The thermocouple 20 is moved upward along the element wire insertion hole 21 by a difference of coefficient of thermal expansion. A housing hole 2 at a depth (n) is formed in the tip of the insulating bar-like body 18, then, expansion movement of the thermocouple 20 is restricted within this range to prevent contact with a protecting tube covering outside thereof. Consequently, disconnection due to the contact of the thermocouple 20 with the protecting tube can be prevented to improve the durability. |
