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发明名称
MATERIAL FEEDER
摘要
申请公布号
JPH07211646(A)
申请公布日期
1995.08.11
申请号
JP19940002377
申请日期
1994.01.14
申请人
MITSUBISHI ELECTRIC CORP
发明人
KATO MANABU;MOTODA TAKASHI;KIMURA TATSUYA;KADOIWA KAORU;KAWATSU YOSHIHEI;FUJII NARIAKI
分类号
C23C16/44;C23C16/448;C23C16/52;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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