| 摘要 |
PURPOSE:To facilitate the manufacturing of an angular velocity sensor and to improve the sensitivity for detecting angular velocity by, exciting strain vibration and vibration in a reverse phase, on the first and second surfaces, respectively, and generating a strain fluctuation by the rotation around a rotary shaft. CONSTITUTION:When AC is applied from an oscillating circuit on piezoelectric elements 13 and 14, flat plates 11 and 12 are vibrated in reverse phases, and the strain vibration around a supporting part 17 is generated. Thus, the flat plate 13 is vibrated. When an angular velocity is inputted around a rotary shaft in this vibrating state, the vibration with Coriolis force is generated in the direction perpendicular to the vibrating direction of the flat plate 13. For this vibration, a vibrating body 10 is vibrated in the circumferential direction with the flat plates 11 and 12 as the radii with the supporting part 17 as the center. Since only the supporting part 17 is fixed to a stage 18, the body cannot be rotated around the supporting part 17, and strain fluctuation is generated in the flat plates 11 and 12. The voltage including the component having the size proportional to the input angular velocity is obtained by using the piezoelectric elements 14 and 15 based on the strain. The component is amplified, and only the output voltage proportional to the angular velocity is extracted. The output is rectified, and the intended angular velocity output is detected. |
