发明名称 FORMATION OF PHTHALOCYANINE FILM
摘要 PURPOSE:To directly form a phthalocyanine film on the surface of a substrate in the same crystal system as that of the raw material. CONSTITUTION:At the time of forming a phthalocyanine film on a substrate by evaporating the raw material of phthalocyanine, the raw material is evaporated by using an electron beam method.
申请公布号 JPH07211958(A) 申请公布日期 1995.08.11
申请号 JP19940001772 申请日期 1994.01.12
申请人 ULVAC JAPAN LTD 发明人 IIJIMA MASAYUKI
分类号 G03G5/05;C09B47/04;G03G5/06;H01L31/08;H01L51/10;H01L51/42;(IPC1-7):H01L51/10 主分类号 G03G5/05
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