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发明名称
Anordnung und Verfahren zum Ermitteln von Fehlern in zu prüfenden Mustern.
摘要
申请公布号
DE68923353(D1)
申请公布日期
1995.08.10
申请号
DE19896023353
申请日期
1989.12.12
申请人
HITACHI, LTD., TOKIO/TOKYO, JP
发明人
MAEDA, SHUNJI, TOTSUKA-KU YOKOHAMA-SHI KANAGAWA-KEN, JP;KUBOTA, HITOSHI, FUJISAWA-SHI KANAGAWA-KEN, JP
分类号
G01B11/24;G01N21/88;G01N21/93;G01N21/94;G01N21/956;G06T1/00;H01L21/66;(IPC1-7):G01N21/88;G01R31/308
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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