申请人 |
ANELVA CORP., FUCHU, TOKIO/TOKYO, JP;NEC CORP., TOKIO/TOKYO, JP |
发明人 |
AKETAGAWA, KEN-ICHI, C/O ANELVA CORPORATION, FUCHU-SHI, TOKYO, JP;SAKAI, JUNRO, C/O ANELVA CORPORATION, FUCHU-SHI, TOKYO, JP;TATSUMI, TORU, C/O NEC CORPORATION, MINATO-KU, TOKYO, JP;MURAKAMI, SHUN-ICHI, C/O ANELVA CORPORATION, FUCHU-SHI, TOKYO, JP;MUROTA, HIROYOSHI, C/O ANELVA CORPORATION, FUCHU-SHI, TOKYO, JP |