| 摘要 |
<p>PURPOSE:To monitor a gas pressure of an apparatus unit by providing divided insulating spacers at each apparatus of both ends of the apparatus unit, connecting each apparatus with a through type insulating spacer and installing a gas monitor at one end and a stop valve at the other end. CONSTITUTION:A gas monitor 15 is connected through a stop valve 16 to an apparatus 11a at one end of the apparatus unit 10 and a stop valve 20 is provided at an apparatus 11b at the other end. A gas pressure of the apparatus 11b at the end is confirmed with a gas transfer by turing the valve 20 to ''open'', and the gas pressure of the apparatus unit 10 is confirmed by providing a temporary pressure guage.</p> |
