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发明名称
Verfahren zur Agglomeratstrahl-Lithographie
摘要
申请公布号
DE4227237(C2)
申请公布日期
1995.08.10
申请号
DE19924227237
申请日期
1992.08.19
申请人
GSPANN, JUERGEN, DR., 76297 STUTENSEE, DE
发明人
GSPANN, JUERGEN, DR., 76297 STUTENSEE, DE
分类号
H01L21/302;C04B41/45;C04B41/53;C23F4/00;G03F7/20;(IPC1-7):C23F4/00;C23C14/04;C30B25/04;H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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