| 摘要 |
PURPOSE: To provide an electrostatic capacitance type acceleration sensor which uses a monocrystal material by constituting a capacitor device with the first fingers and the second fingers. CONSTITUTION: An acceleration sensor concerned consists of a bond-shaped tremor mass body 10 made of monocrystal silicon (n-form silicon). On longitudinal side faces of each member piece of the mass body 10, the first fingers 13 configured as a thin and long capacitor plate having a small thickness are formed in consolidated structure perpendicularly to the longitudinal direction of the mass body 10, and these fingers are alike made of monocrystal n-form silicon. Between these fingers, the second fingers 14 arranged on the inside and outside in finger shape and configured as a capacitor plate are extending, and are secured to a base board 12 at the end situated opposite to the mass body 10. The fingers 13, 14 constitute one capacitor device, and its capacitance varies when the mass body 10 moves in the longitudinal direction, so that the acceleration can be sensed through the varying capacitance. |
