发明名称 |
MANUFACTURING METHOD OF DISPLAY PANNEL |
摘要 |
The method improves the pad unit forming in which a wire and a pad unit of gate are electrically connected, and increases the fidelity of TFT(Thin Film Transistor) for preventing short circuit among metal wires. The methods comprises a gate forming process on a insulation board, a pad forming process for overlaying an end of gate wire on the insulation board, a oxidation layer and silicon layer forming process on the gate wire and pad surface, a photo-resistor pattern forming process on the silicon layer, and a photo-resistor removing process. The gate and gate wire are formed by one of Al and Al compounds such as Al-Si, Al-Pd, Al-Ni, Al-Ge, and Al-W families.
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申请公布号 |
KR950008931(B1) |
申请公布日期 |
1995.08.09 |
申请号 |
KR19920013025 |
申请日期 |
1992.07.22 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM, SANG - SU;JANG, IN - SHIK;KIM, DONG - KYU;PAE, YONG - KUK |
分类号 |
G02F1/1343;G02F1/1345;G02F1/136;G02F1/1362;G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L29/78;H01L29/786;(IPC1-7):G02F1/133 |
主分类号 |
G02F1/1343 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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