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发明名称
摘要
申请公布号
JPH0775233(B2)
申请公布日期
1995.08.09
申请号
JP19870230136
申请日期
1987.09.14
申请人
发明人
分类号
B01F1/00;H01L21/3205;H01L21/3213;H01L21/82;H01L23/52;(IPC1-7):H01L21/320
主分类号
B01F1/00
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