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发明名称
摘要
申请公布号
JPH0775244(B2)
申请公布日期
1995.08.09
申请号
JP19900310722
申请日期
1990.11.16
申请人
发明人
分类号
H01L21/306;H01L21/762;H01L21/763;(IPC1-7):H01L21/762
主分类号
H01L21/306
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