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发明名称
APPARATUS FOR DEPOSITING AMORPHOUS SILICON USING MICRP WAVE
摘要
申请公布号
KR1019950008846(B1)
申请公布日期
1995.08.08
申请号
KR1019920007478
申请日期
1992.05.01
申请人
发明人
分类号
主分类号
代理机构
代理人
主权项
地址
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