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经营范围
发明名称
CONVEYANCE MECHANISM
摘要
申请公布号
JPH07205066(A)
申请公布日期
1995.08.08
申请号
JP19940006142
申请日期
1994.01.25
申请人
JEOL LTD
发明人
WATANABE IWAO
分类号
B25J9/06;B25J15/00;H01L21/027;H01L21/677;H01L21/68;H01L21/683;(IPC1-7):B25J9/06
主分类号
B25J9/06
代理机构
代理人
主权项
地址
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