发明名称 |
Scanning probe microscope |
摘要 |
A scanning probe microscope uses a conductive material as a probe of AFM. The probe scans a sample while the probe is forcibly oscillated by applying alternating current voltage from an oscillator between the probe and the sample. Signals omega and 2 omega from the probe are extracted with an analog processor using a discrete Fourier transformation, so that distribution of surface potential of the sample is obtained using the signals omega and 2 omega .
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申请公布号 |
US5440121(A) |
申请公布日期 |
1995.08.08 |
申请号 |
US19930174292 |
申请日期 |
1993.12.28 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
YASUTAKE, MASATOSHI;NAKAMURA, NOBUTAKA |
分类号 |
G01Q10/00;G01Q60/30;G01Q60/32;G01Q60/40;(IPC1-7):H01J37/00 |
主分类号 |
G01Q10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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