发明名称 Scanning probe microscope
摘要 A scanning probe microscope uses a conductive material as a probe of AFM. The probe scans a sample while the probe is forcibly oscillated by applying alternating current voltage from an oscillator between the probe and the sample. Signals omega and 2 omega from the probe are extracted with an analog processor using a discrete Fourier transformation, so that distribution of surface potential of the sample is obtained using the signals omega and 2 omega .
申请公布号 US5440121(A) 申请公布日期 1995.08.08
申请号 US19930174292 申请日期 1993.12.28
申请人 SEIKO INSTRUMENTS INC. 发明人 YASUTAKE, MASATOSHI;NAKAMURA, NOBUTAKA
分类号 G01Q10/00;G01Q60/30;G01Q60/32;G01Q60/40;(IPC1-7):H01J37/00 主分类号 G01Q10/00
代理机构 代理人
主权项
地址