发明名称 |
Process of fabricating an enlongated microstructure element on a substrate |
摘要 |
The invention concerns a fabrication process of at least one generally elongated structural element (14) on a substrate (12) in a first material and having a substantially flat upper face (13), said element (14) realized in a second material comprising at least a first wing (14a) parallel to a plan perpendicular to said upper face (13). |
申请公布号 |
US5439552(A) |
申请公布日期 |
1995.08.08 |
申请号 |
US19930145697 |
申请日期 |
1993.11.04 |
申请人 |
CSEM - CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA |
发明人 |
MORET, JEAN-MARC |
分类号 |
H01L21/302;B81B3/00;C23C16/01;H01H1/00;H01L21/3065;(IPC1-7):B44C1/22 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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