发明名称 Process of fabricating an enlongated microstructure element on a substrate
摘要 The invention concerns a fabrication process of at least one generally elongated structural element (14) on a substrate (12) in a first material and having a substantially flat upper face (13), said element (14) realized in a second material comprising at least a first wing (14a) parallel to a plan perpendicular to said upper face (13).
申请公布号 US5439552(A) 申请公布日期 1995.08.08
申请号 US19930145697 申请日期 1993.11.04
申请人 CSEM - CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA 发明人 MORET, JEAN-MARC
分类号 H01L21/302;B81B3/00;C23C16/01;H01H1/00;H01L21/3065;(IPC1-7):B44C1/22 主分类号 H01L21/302
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