| 摘要 |
<p>PURPOSE:To provide a cassette keeping case which does not require the high washability at the keeping place. CONSTITUTION:A cassette keeping case is composed of a lower case 20 by which a wafer cassette 1 is positioned and supported, an upper case 10 which is attached onto the lower case 20 easily detachably and covers and houses the wafer cassette 1 with the lower case 20, a fixing means 40 with which the upper case 10 is fixed to the lower case 20 and a sealing member 24 with which the contact parts 12 and 23 between the lower case 20 and the upper case 10 are tightly sealed. The upper case 10 and the lower case 20 are unified by the fixing means 40 and the contact parts 12 and 23 between the upper case 10 and the lower case 20 are tightly sealed with the sealing member 24, so that the inside of the case is protected from the penetration of dusts while it is stored.</p> |
