| 摘要 |
PURPOSE:To provide a radiation detector in which energy resolution and sensitiv ity are improved. CONSTITUTION:A radiation detector comprises a lower wiring 2 and a lower electrode 1 formed of the same film, an upper electrode 4 in such a manner that areas of the electrode 1 and the electrode 4 are constant in a thickness direction in a superconducting tunnel junction equal to an area of a tunnel barrier 3 with a length of 10mum or more from a position in contact with the junction, wherein the lower wiring is formed of a lower electrode layer, a tunnel barrier layer and an upper electrode layer in such a manner that areas of the lower electrode layer, the barrier layer and the upper electrode layer at the three-layer part are equal. Thus, the detector has a structure in which there is no area in no contact with the tunnel barrier in the electrode. Electrons excited by a radioactive ray or a light can efficiently become signal charge in the electrode to improve sensitivity, and a variation of an amplitude of a signal at an incident position of the ray is reduced, and hence energy resolution is improved as well.
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