| 摘要 |
PURPOSE:To improve sensitivity of measuring the inclination of an objective lens and to easily adjust a focus necessary at the time of measuring. CONSTITUTION:A laser light emitted from an LD projector 8 is led through a ring filter 13 to an objective lens 5, a light converged into a beam spot is transmitted through a correction plate 7 and a diffracted light of + or - n-th order emerging at this time is magnified by a microscope 15 and an image thereof is picked up. Thus, by being transmitted through the ring filter 13 the deflection of the diffracted light of + or - first order against a diffracted light of 0 order generated by the inclination of the objective lens 5 is emphasized. |
