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发明名称
MANUFACTURE OF METALLIC WIRING
摘要
申请公布号
JPH07201998(A)
申请公布日期
1995.08.04
申请号
JP19940318177
申请日期
1994.12.21
申请人
GENDAI DENSHI SANGYO KK
发明人
SAI GIYONKON
分类号
H01L23/522;H01L21/28;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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