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发明名称
CRYSTAL GROWTH METHOD FOR COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH07201735(A)
申请公布日期
1995.08.04
申请号
JP19930273548
申请日期
1993.11.01
申请人
HITACHI LTD
发明人
KAWADA MASAHIKO
分类号
C30B23/08;C30B29/40;H01L21/203;(IPC1-7):H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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