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发明名称
METHOD FOR PEELING ORGANIC MATERIAL FILM
摘要
申请公布号
JPH07201817(A)
申请公布日期
1995.08.04
申请号
JP19930335056
申请日期
1993.12.28
申请人
FUJITSU LTD
发明人
KOBAYASHI MASAYA
分类号
H01L21/302;B81C99/00;H01L21/027;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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