发明名称 HEATING DEVICE
摘要 PURPOSE:To provide a heating device provided with a structure that the breaking of a heating part due to its thermal deformation in the case where the heating part is thermally expanded by a temperature rise can be prevented CONSTITUTION:In a heating device 10 having a support part 36 connectable electrically the end part in the extension direction of a discharge electrode 18, which can make the temperature of a peripheral atmosphere rise, with a feed part 22, an insertion hole for supporting the electrode 18 is formed in the interior of the part 36, a housing space 42 to oppose to the outer surface of the electrode 18 is formed in one part of the insertion hole and a liquefied conductive material 40, which comes into contact with the side of the electrode 18, is sealed and is provided in the space 4. As a result, in the case where the electrode 18 is thermally expanded and is stretched, a stretch displacement of the electrode 18 is avoided without regulating because the electrode 18 can be smoothly moved between the electrode and the liquefied conductive material. Thereby, the breaking of a member 12A formed integrally with the electrode 18 can be prevented.
申请公布号 JPH07201766(A) 申请公布日期 1995.08.04
申请号 JP19930351400 申请日期 1993.12.28
申请人 TOKYO ELECTRON LTD;TOKYO ELECTRON TOHOKU LTD 发明人 OKASE WATARU
分类号 H01L21/22;H01L21/205;H01L21/31;H01L21/324;(IPC1-7):H01L21/22 主分类号 H01L21/22
代理机构 代理人
主权项
地址