HIGH-TEMPERATURE SUPERCONDUCTING MICROWAVE BANDPASS FILTER AND ITS MANUFACTURE

摘要

PURPOSE: To provide a manufacture of a passive element for information communication, especially a band pass filter with an excellent performance in a high frequency area. CONSTITUTION: An epitaxial thin film 5 of an oxide high temperature superconducting body is formed. A band pass filter with YBCO/MgO/Cu/Au or a YBCO/LaA103/Cr/Cu/Au structure for high frequency is manufactured by applying a photo lithographic process and a mixed etching process to the thin film 5. As a result, precision and sharpness of a circuit pattern formed on a substrate is much improved.