A CAPACITIVE PRESSURE SENSOR HAVING A REDUCED AREA DIELECTRIC SPACER
摘要
A silicon capacitive pressure sensor is disclosed that has a glass dielectric material sputter-disposed onto a silicon substrate of the sensor. After deposition of the bulk dielectric material, the glass is patterned and etched to form a pair of concentric rings. An inner ring is of a circular shape, while the outer ring is of an octagonal shape. As compared to prior art dielectric spacers which are of a single ring of relatively wide thickness, the pair of concentric rings disclosed herein significantly reduce the parasitic capacitance of the glass dielectric material, thereby increasing the sensitivity of the sensor.
申请公布号
CA2182180(A1)
申请公布日期
1995.08.03
申请号
CA19952182180
申请日期
1995.01.26
申请人
BREED AUTOMOTIVE TECHNOLOGY, INC.
发明人
PROVENZANO, PAUL L.;SWINDAL, JAMES L.;KUHLBERG, ROBERT J.;BRAHM, CHARLES B.;MEYER, HAROLD D.;GOBETZ, FRANK W.;WIEGAND, WALTER J.;BULLIS, ROBERT H.