METHOD OF MAKING SINGLE CRYSTAL GALLIUM NITRIDE

摘要

A method of making a single crystal Ga*N article (10), including the steps of: providing a substrate (20) of crystalline material having a surface (16) which is epitaxially compatible with Ga*N; depositing a layer of single crystal Ga*N (26) over the surface of the substrate; and etchably removing the substrate from the layer of single crystal Ga*N, to yield the layer of single crystal Ga*N as said single crystal Ga*N article. The invention is an article aspect relates to bulk single crystal Ga*N articles, such as are suitable for use as a substrate for the fabrication of microelectronic structures thereon, and to microelectronic devices comprising bulk single crystal Ga*N substrates, and their precursor structures.