Auslegertastspitze zur Anwendung in einem Rasterkraftmikroskop und Verfahren zu seiner Herstellung.

摘要

An atomic force microscope for observing a sample surface (7) is internally provided with a cantilever stylus (1, 14, 23) and makes use of atomic forces acting between the cantilever stylus (1, 14, 23) and the sample surface. The cantilever stylus (1, 14, 23) includes a cantilever (2, 15, 22) having a fixed end and a free end and having two principal surfaces. The cantilever stylus (1, 14, 23) further includes two tip portions formed in the principal surfaces of the free end, respectively. One of the two tip portions has a radius of curvature less than 0.1 mu m and protrudes beyond the other tip portion so that the former may be used to observe the sample surface (7).