申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
SATOSHI, WATANABE, C/O SPEC. CHEM. RES. CENTER;YOUICHI, OHSAWA, C/O SPEC. CHEM. RES. CENTER;TOSHINOBU ISHIHARA, C/O SPEC. CHEM. RES. CENTER;KAZUMASA, MARUYAMA, C/O SPEC. CHEM. RES. CENTER;YOSHIHUMI, TAKEDA, C/O SPEC. CHEM. RES. CENTER;JUNJI, SHIMADA, C/O SPEC. CHEM. RES. CENTER;KATSUYA, TAKEMURA, C/O SPEC. CHEM. RES. CENTER;YAGIHASHI, FUJIO, C/O CORPORATE RESEARCH CENTER |