PRODUCTION OF OPTICAL WAVEGUIDE

摘要

PURPOSE:To provide a process for producing an optical waveguide by forming a polymer thin film which is partially increased in film thickness by using electric field assisted CVD and using this thin film as the optical waveguide. CONSTITUTION:This process includes a stage for forming substrate electrodes on the surface of a substrate 1 to be formed with the optical waveguide, a stage for arranging a counter electrode member 6 apart a prescribed spacing from the surface of the substrate 1, a stage for impressing a prescribed voltage between the substrate electrodes and the counter electrode member 6 and a stage for allowing monomers to form a copolymer to fly onto the surface of the substrate 1 and forming the polymer thin film thicker than the part where the part facing the counter electrode member 6 does not face the counter electrode member 6 on the substrate electrodes.